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Model U701 UHP Liquid Flo-Sensor
The Model U701 Ultra-High-Purity (UHP) Flo-Sensor will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 LPM. Repeatable results are achieved by utilizing a patented microturbine flow sensor design. This concept allows accurate flow measurement with no zero drift and no particle generation! PTFE, Kal-Rez®, and sapphire wetted surfaces insure compatibility with CMP slurries, acids, solvents, deionized water, photodeveloper solutions, and most other high-purity fluids.
The Model U701 UHP Flo-Sensor integrates this microturbine design with advanced electronics to provide a passive BOSFET pulse signal, frequency proportional to flow rate. Patented* McMillan design means long life expectancy under normal operating conditions - over 50,000 hours MTBF (ongoing testing).
Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all Flo-Sensors. ±0.2% full-scale repeatability reassures process engineers that results will be consistent. An optional temperature rating of 0-90°C allows use in most UHP applications.
Wetted Parts: PTFE, Kal-Rez®, and sapphire.
For detailed ordering information, please download the U701 Sales Brochure (PDF, 1.29MB).
View the Purity Analysis for the U701
View the Zero Particle Generation information for the U701
View the Principle of Operation for the U701
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